The Performance of AC-coupled Strip LGAD developed by IHEP
Extracted source text · arXiv 2307.03894
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\begin{document}
%\linenumbers
\title{Characterisation of Spatial and Timing Resolution of IHEP AC-LGAD Strip}
\author{ Weiyi Sun, Mengzhao Li, Zhijun Liang, Mei Zhao, Yunyun Fan, Tianya Wu, Wei Wang, Xuan Yang, Bo Liu, Shuqi Li, Chengjun Yu, Xinhui Huang,Yuan Feng, Yuekun Heng, \IEEEmembership{Member, IEEE}, Gaobo Xu, João Guimaraes da Costa
\thanks{This work was supported in part by the National Natural Science Foundation of China under Grant 12042507, Grant 12175252, Grant 12275290, Grant 11961141014, Grant 12105298; in part by the China Postdoctoral Science Foundation under Grant 2022M722964; in part by the National Key R$\&$D Program of China under Grant 2022YFE0116900; in part by the State Key Laboratory of Particle Detection and Electronics under Grant SKLPDE-ZZ-202214, Grant SKLPDE-ZZ-202204; and in part by the Scientific Instrument Developing Project of the Chinese Academy of Sciences under Grant ZDKYYQ20200007.}
\thanks{ Weiyi Sun, Mengzhao Li, Zhijun Liang, Mei Zhao, Yunyun Fan, Tianya Wu, Wei Wang, Bo Liu, Xuan Yang, Shuqi Li, Chengjun Yu, Xinhui Huang, Yuan Feng, Yuekun Heng, João Guimaraes da Costa are with the Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China. (Corresponding author: Mengzhao Li (mzli@ihep.ac.cn), Zhijun Liang (liangzj@ihep.ac.cn))}
\thanks{Mengzhao Li is also with the China Center of Advanced Science and Technology, Beijing 100190, China.}
\thanks{Weiyi Sun, Shuqi Li, Chengjun Yu, Xinhui Huang, Yuan Feng, Yuekun Heng are also with the School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China.}
\thanks{Gaobo Xu is with the Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.}}
\maketitle
\begin{abstract}
AC-coupled LGAD(AC-LGAD) Strip is a new design of LGAD that allows high-precision detection of particle spatiotemporal information whereas reducing the density of readout electronics. For AC-LGAD Strips, there is limited research on the impact of different strip pitches on the spatiotemporal detection performance at the small amount of injected charge. The Institute of High Energy Physics has designed an AC-LGAD Strip prototype with pitches of 150 $\mu m$, 200 $\mu m$, and 250 $\mu m$. The spatial and timing resolutions of the prototype are studied through the laser Transient Current Technique (TCT) scan with different amounts of injected charge.
The results show that both the spatial and timing resolution improves as the strip pitch decreases. Increases in both temporal and spatial resolutions as the amount of charge injected increases are observed. The spatial and timing resolution is better than 60 ps and 40 $\mu m$ at 1 Minimum Ionizing Particle (MIP), and better than 10 ps and 5 $\mu m$ at 40 MIPs. Increasing Signal-to-Noise Ratio (SNR) is the key to improving spatial and temporal resolution, whereas increasing the signal attenuation rate by reducing the gap between adjacent electrodes also helps to improve spatial resolution. The enhancements of spatial and timing resolutions by both SNR and signal attenuation rate decrease with increasing amount of MIP. This study can help design and optimize the AC-LGAD Strip detectors and readout electronics.
\end{abstract}
\begin{IEEEkeywords}
AC-LGAD,Silicon Detector,Spatial resolution,Timing resolution
\end{IEEEkeywords}
\section{Introduction}
\label{sec:introduction}
\IEEEPARstart{L}{ow} Gain Avalanche Diode (LGAD) have demonstrated excellent timing performance, making them essential for precise timing measurements in particle physics experiments\cite{Pellegrini_2014,Moffat2018}. However, LGAD's ability to achieve high-precision spatial resolution is limited due to the limitation of pixel size caused by dead zones (Junction Termination Extension (JTE) and P-stop)\cite{Giacomini2021}. To overcome this limitation, AC-Coupled LGADs (AC-LGADs) have been developed as an extension of LGAD technology\cite{Giacomini2019,Nakamura2021}.
AC-LGADs offer the capability to simultaneously measure time and space information with high precision and provide 100\% filling factor and reduced electronic channel density compared to traditional LGADs\cite{Kim2016,Giacomini_2019}. Building upon this progress, AC-LGAD Strips have emerged as a new variant of AC-LGADs\cite{Paternoster2017,ONARU2021164664}. These AC-LGAD Strips have garnered significant interest and have been considered to be used in Electron-Ion Collider (EIC) as trackers and Time-of-flight detectors simultaneously\cite{osti_1764596,Heller2022}. At the same time, it has the potential to be used in future colliders such as Circular Electron Positron Collider (CEPC) and Future Circular Collider (FCC)\cite{Apresyan_2020,Wada_2019,DtextquotesingleAmen2021}.
The Institute of High Energy Physics(IHEP) has designed an AC-LGAD Strip prototype, which utilizes strip electrodes. In this study, we focus on investigating the impact of pitch size and amount of injected charge on the achievable time resolution and spatial resolution of AC-LGAD Strips. To perform this analysis, the Transient Current Technique (TCT) was employed\cite{Eremin1996,9292990}. This study will help to optimize the design of LGAD detectors in the future.
\section{Design of IHEP AC-LGAD Strip}
\label{sec:design}
The AC-LGAD Strip sensor used in this experiment is designed by IHEP and fabricated by the Institute of Microelectronics (IME). The device structure from top to bottom is electrodes, N$^{+}$ layer, P$^{+}$ layer , P-type bulk, P$^{++}$ layer and aluminum anode as illustrated in \figurename~\ref{structure}(a).
The JTE is designed to uniform edge electric field, avoiding an early breakdown. The schematic of AC-LGAD Strip is shown in \figurename~\ref{structure}(b). Three pitch sizes are designed, which are 250$\mu m$, 200$\mu m$, and 150$\mu m$, and the width of the strip electrodes is 100$\mu m$. The gaps between two adjacent strip electrodes are 150$\mu m$, 100$\mu m$, and 50$\mu m$.
\begin{figure}[htbp]
\centering
\subfigure[]{
\includegraphics[width=3.5in]{structure.png}
}
\subfigure[]{
\includegraphics[width=3.5in]{Strip_s.png}
}
\caption{Schematic of sectional view (a) and top view (b) of IHEP AC-LGAD Strip. (Not to scale) Four strip electrodes make up three pitches and three gaps. The width of four strip electrodes is 100 $\mu m$. }
\label{structure}
\end{figure}
\section{Experimental Setups}
The spatial and timing resolutions of AC-LGAD Strip are tested through TCT, and the TCT platform is shown in \figurename~\ref{TCT}.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{TCT.png}}
\caption{The schematic of the TCT Platform. }
\label{TCT}
\end{figure}
Strips of the AC-LGAD Strip are bonded to the four-channel readout board, as shown in \figurename~\ref{RDB}. A bias voltage of -375V is applied to the back side of the AC-LGAD Strip. The signals of the electrodes are recorded by the oscilloscope (Teledyne LeCroy HDO9204) after the pre-amplifier and second amplifier. The bandwidth of the oscilloscope is 2GHz, and the sampling rate is 20G/s for four channels.
\begin{figure}[t]
\centerline{\includegraphics[width=1.75in]{RdB.png}}
\caption{Strips of the AC-LGAD Strip is bonded to the four-channel readout circuit. }
\label{RDB}
\end{figure}
A picosecond laser pulse with a frequency of 20 MHz hit on the AC-LGAD Strip using a focuser. Attenuators with varying transmittance are positioned between the focuser and the AC-LGAD Strip to adjust the laser intensity. The focuser is fixed on the pinning table to achieve high precision movement better than 1 $\mu m$.
The laser scan tests start from the upper edge of strip 1 and end at the lower edge of strip 4 with a step of 2 $\mu m$, as shown in \figurename~\ref{structure}(b). 1000 waveforms are recorded at each point before moving to the next point. The laser is used to simulate the Minimum Ionizing Particle (MIP) hitting the AC-LGAD Strip, and the amount of charge injected is adjusted by varying the laser intensity. The amount of MIPs is used to represent the injected charge. The laser scan test is repeated seven times, with the amount of injected charge of 1 MIP, 2 MIPs, 4 MIPs, 8 MIPs, 20 MIPs, 40 MIPs, and 80 MIPs. Furthermore, the laser spot size remains within $5 \mu m$ for all MIP values. Considering that the signal is not generated at the strip electrodes, gaps will be used to characterize pitch in the following.
\section{Analysis and results}
\label{analysis}
\subsection{Signal Property}
The amplitude of the signal induced by the laser decays with distance to the electrode, which leads to variations in the signal amplitudes in four channels. For instance, when a hit occurs in gap 1 and close to strip electrode 1, the signals exhibit different amplitudes in the four channels, as illustrated in \figurename~\ref{signal}. Since the hit is closer to strip 1, the maximum amplitude is observed in channel 1, whereas the minimum amplitude is detected in channel 4.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{Signal_4C.pdf}}
\caption{Signal waveform of a hit of four strip electrodes. }
\label{signal}
\end{figure}
\subsection{Position Reconstruction}
The position reconstruction method relies on the variation in signal amplitudes between the two strip electrodes closest to the hit position. When laser or particles hit on gap 1, the signal amplitudes of electrodes 1 and 2 change with the hit position. The hit positions are characterized by the ratio $R$, defined as:
\begin{equation}
R=\frac{Amp_2}{Amp_1+Amp_2}
\end{equation}
Here, $Amp_1$ and $Amp_2$ represent the signal amplitudes of electrodes 1 and 2, respectively.
Here we show $R$ and signal amplitudes of strips 1 and 2 under 20 MIPs at different positions in \figurename~\ref{ratio}.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{rariofinal.pdf}}
\caption{Laser hit position as a function of $R$. The width of the gap (gap 1) is 150 $\mu m$. Amp2/(Amp1+Amp2) means the signal amplitudes ratio $R$ of strip 1 to the summation of strips 1 and 2. A linear fit to the slope $k_R$ is applied. (a) Difference between the signal amplitude of strips 1 and 2 in this gap. A linear fit is applied. (b) The amount of injected charge is 20 MIPs.}
\label{ratio}
\end{figure}
The relationship between $R$ and the hit position is approximately linear and can be fitted with a linear equation of the form $R=k_R\cdot x+c$. Therefore, the laser hit position $x$ can be calculated by the following equation:
\begin{equation}
x=\frac{R-c}{k_R}
\label{fit}
\end{equation}
Here, $R$ is the ratio, $k_R$ and $c$ are the fitted slope of $R$ and fitted constant, respectively.
To investigate the factors affecting the slope, the difference between the signal amplitude of strips 1 and 2 in gap 1 is plotted in \figurename~\ref{ratio}(b). Since the signal amplitude strength diminishes as the distance from the strip electrode increases, the difference in signal amplitude between two strip electrodes is used to characterize the signal attenuation rate $A$. $A$ is the amount of change in the signal amplitude per unit distance.
\figurename~\ref{ratio}(b) illustrates an approximately linear relationship between the difference in signal amplitude on strips 1 and 2 and the hit position. A linear fit is applied to its slope, which is the signal attenuation rate $A$. $A$ of the first gap $A_1$ is $0.4$ mV/$\mu m$ as the figure shows. Similarly, $A$ of the rest two gaps, $A_2$ and $A_3$, are $0.4$ mV/$\mu m$ and $0.5$ mV/$\mu m$.
To obtain the spatial resolution, 1000 waveforms per laser hit position are recorded, resulting in 1000 reconstructed positions per laser hit position. The difference between the reconstructed positions and the laser hit positions of all hits in the gap is plotted as one histogram. The sigma of the fit corresponds to the spatial resolution of the gap. \figurename~\ref{resl5} displays the histogram of the differences between the reconstructed and true positions for hits with the amount of injected charge of 8 MIPs. The spatial resolutions of gap 1, gap 2, and gap 3 are determined to be 23.2 $\mu m$, 20.8 $\mu m$, and 18.1 $\mu m$, respectively.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{res_3l.pdf}}
\caption{difference between true position and the reconstructed position of three gaps at 8 MIPs with Gaussian fit. The resolutions of gap 1, gap 2, and gap 3 are 23.2 $\mu m$, 20.8 $\mu m$, and 18.1 $\mu m$, respectively.}
\label{resl5}
\end{figure}
\subsection{Characterization of spatial resolution}
The relationship between spatial resolution and the amount of MIPs is depicted in \figurename~\ref{respa}. Within the injected charge range from 1 to 40 MIPs, the spatial resolution values for all three gaps exhibit a decreasing trend as MIPs increase. No significant change in spatial resolution after the amount of injected charge greater than 20 MIPs, and beyond 40 MIPs, there is a slight increase in the resolution values for all three gaps. Still, the increase remains within 2 $\mu m$. The highest resolution is achieved at 40 MIPs, with resolutions of 5.6 $\mu m$, 4.8 $\mu m$, and 4.5 $\mu m$ for gap 1, gap 2, and gap 3, respectively. The resolutions at 1 MIP are 39.8 $ \mu m$, 36.5 $\mu m$, and 30.1 $\mu m$ for the three gaps, respectively. At 80 MIPs, the resolutions for the three gaps are 6.4 $ \mu m$, 5.5 $\mu m$, and 4.7 $\mu m$.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{Res_p_ALLNSNRN.pdf}}
\caption{Resolution vs. gap at different amounts of injected charge.}
\label{respa}
\end{figure}
\figurename~\ref{snr} (a) and (b) show the SNR and the $k_R$ of three gaps. It can be observed that the SNR initially increases and then decreases, with the highest SNR of 39.71 occurring at 40 MIPs.
$k_R$ of the three gaps are different at each amount of MIP. $k_R$ is largest of the 50 $\mu m$ gap and smallest of the 150 $\mu m$ gap.
\begin{figure}[htbp]
\centering
\subfigure[]{
\includegraphics[width=.8\linewidth]{SNR2A.pdf}
}
\subfigure[]{
\includegraphics[width=.8\linewidth]{SLOPEN.pdf}
}
\subfigure[]{
\includegraphics[width=.8\linewidth]{Dif_all.pdf}
}
\caption{SNR of different amounts of MIP (a). $k_R$ of three gaps (b). The relationship between signal attenuation rate $A$ and amount of MIP of three gaps(c).}
\label{snr}
\end{figure}
The relationship between spatial resolution and SNR is represented in \figurename~\ref{resa}. The figure indicates that higher SNR values correspond to better spatial resolution.
Whereas the $k_R$ of the three gaps remain relatively constant, \figurename~\ref{snr}(a) illustrates that the SNR initially increases and then decreases. As a result, an optimal value in the spatial resolution exists, which is 4.46 $\mu m$ at 40 MIPs.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{Res_ALLN2SNRN.pdf}}
\caption{Spatial resolution vs. SNR of three gaps. }
\label{resa}
\end{figure}
The relationship between $A$ and the amount of MIP is plotted in \figurename~\ref{snr}(c). Increasing the amount of charge injection leads to an increase in signal amplitude, thereby causing a greater $A$. When comparing $A$ of different gap widths, it is observed that larger gaps correspond to smaller values of $A$. Consequently, it can be concluded that the signal attenuation rate $A$ and $k_R$ increase as the gap width decreases.
From \figurename~\ref{snr}(b) and (c) as discussed above, under the same amount of MIPs, smaller gap widths correspond to larger signal attenuation rate $A$, and finally result in a larger $k_R$. From equation (\ref{fit}), under the same amount of MIP, a larger $k_R$ results in a smaller difference between the hit position and the reconstructed position caused by the same intensity of noise. Therefore, increasing the signal attenuation rate through reduced gap width can enlarge the value of $k_R$, leading to improved spatial resolution at the same amount of MIP.
In conclusion, improving the SNR and reducing the gap to enlarge $A$ can improve spatial resolution.
\subsection{Characterization of Timing Resolution}
The arrival time of a particle or laser hit ($t_{arrived}$) is defined as the mean value of the cross-threshold time of two electrodes:
\begin{equation}
t_{arrived}=(t_1+t_2)/2
\end{equation}
Where $t_1$ and $t_2$ are the cross-threshold time of strip electrodes 1 and 2 obtained according to the constant fraction discriminator(CFD) method. The spread of arrival time is mainly composed of the time resolution of AC-LGAD ($\sigma_{ACtime}$) and the jitter of the start time $\sigma_{t_0}$:
\begin{equation}
\sigma^2_{(t_1+t_2)/2}=\sigma^2_{ACtime}+\sigma^2_{t_0}
\end{equation}
To avoid the jitter of starting time, the time resolution of AC-LGAD Strip can be calculated by:
\begin{equation}
t_{ACtime}=(t_1-t_2)/2.
\end{equation}
Similar to spatial resolution, $\Sigma$ of this distribution is defined as the timing resolution.
Distribution of $t_{ACtime}=(t_1-t_2)/2$ of a hit of 20 MIPs is shown in \figurename~\ref{tres1p}.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{tres_1p.pdf}}
\caption{Distribution of $t_{ACtime}=(t_1-t_2)/2$ of a hit at 20 MIPs. The Sigma of the distribution is 22.2 ns. }
\label{tres1p}
\end{figure}
The relationship between timing resolution and SNR is shown in \figurename~\ref{tres}. From the figure, it can be observed that the trend of timing resolution with the amount of MIP is similar to the trend of spatial resolution with the amount of MIP, as analyzed earlier. However, the gap between strips has almost no effect on timing resolution.
Similar to spatial resolution, timing resolution exhibits the optimal value, which is $9.2$ ps at 20 MIPs. Furthermore, timing resolutions better than 30 ps are achieved when the amount of injected charge exceeds 2 MIPs. It is worth noting that the optimal timing resolution does not necessarily correspond to the maximum SNR. This discrepancy may be attributed to the timing resolution being calculated using the rising edge of the signal rather than the signal amplitude, but this needs further study.
In conclusion, increasing the SNR can enhance the timing resolution similar to spatial resolution.
\begin{figure}[t]
\centerline{\includegraphics[width=3.5in]{tRes_ALLSNR.pdf}}
\caption{Timing resolution vs. the amount of MIP of three gaps. }
\label{tres}
\end{figure}
\section{Conclusion}
The AC-LGAD Strip sensors, characterized by their lower readout electronic density, exhibit significant potential for application in future colliders, such as EIC, CEPC, and FCC. IHEP has designed an AC-LGAD Strip prototype and conducted a laser TCT scanning experiment to investigate the variations in spatial and timing resolutions under different incident amounts of injected charge and gaps between strip electrodes.
The findings reveal that at the small amount of injected charge, both spatial and timing resolutions rapidly decrease until reaching an optimal value. In contrast, at the high amount of injected charge, a gradual increase is observed. The SNR plays an important role in influencing both spatial and timing resolutions, whereas the signal attenuation rate primarily affects spatial resolution. The SNR impacts both resolutions, whereas the signal attenuation rate influences spatial resolution through its effect on the $k_R$ during reconstruction. Consequently, optimizing fabrication process parameters and readout circuit design to improve SNR and increasing the signal attenuation rate to enhance $k_R$ can effectively improve the spatiotemporal detection performance of the AC-LGAD Strip.
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\field{title}{Technology developments and first measurements of Low Gain Avalanche Detectors ({LGAD}) for high energy physics applications}
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\field{abstract}{A new avalanche silicon detector concept is introduced with a low gain in the region of ten, known as a Low Gain Avalanche Detector, LGAD. The detector's characteristics are simulated via a full process simulation to obtain the required doping profiles which demonstrate the desired operational characteristics of high breakdown voltage (500 V) and a gain of 10 at 200 V reverse bias for X-ray detection. The first low gain avalanche detectors fabricated by Micron Semiconductor Ltd are presented. The doping profiles of the multiplication junctions were measured with SIMS and reproduced by simulating the full fabrication process which enabled further development of the manufacturing process. The detectors are 300 μm thick p-type silicon with a resistivity of 8.5 kΩcm, which fully depletes at 116 V. The current characteristics are presented and demonstrate breakdown voltages in excess of 500 V and a current density of 40 to 100 nAcm−2 before breakdown measured at 20̂C. The gain of the LGAD has been measured with a red laser (660 nm) and shown to be between 9 and 12 for an external bias voltage range from 150 V to 300 V.}
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\field{month}{3}
\field{number}{03}
\field{title}{Low Gain Avalanche Detectors (LGAD) for particle physics and synchrotron applications}
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\field{abstract}{Detectors that can simultaneously provide fine time and spatial resolution have attracted wide-spread interest for applications in several fields such as high-energy and nuclear physics as well as in low-energy electron detection, photon science, photonics and imaging. Low-Gain Avalanche Diodes (LGADs), being fabricated on thin silicon substrates and featuring a charge gain of up to 100, exhibit excellent timing performance. Since pads much larger than the substrate thickness are necessary to achieve a spatially uniform multiplication, a fine pad pixelation is difficult. To overcome this limitation, the AC-coupled LGAD approach was introduced. In this type of device, metal electrodes are placed over an insulator at a fine pitch, and signals are capacitively induced on these electrodes. At Brookhaven National Laboratory, we have designed and fabricated prototypes of AC-coupled LGAD sensors. The performance of small test structures with different particle beams from radioactive sources are shown.}
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\field{abstract}{A Low Gain Avalanche Diode (LGAD) is a semiconductor device that amplifies signals inside a sensor, using an avalanche mechanism. As the charge multiplication occurs within a thin p–n junction and the sensor can be made thin, it can achieve a superior time resolution. For example, a resolution of 30 ps was obtained in our previous beam-test study. In combination with the excellent 3-D spatial information achievable by semiconductor devices, we are aiming to develop a 4-D detector. Although high-energy beams are extremely useful for evaluating the time resolution of LGADs, desktop measurement systems are also helpful for the swift evaluation of LGAD samples under development. Therefore, we are developing a time measurement system using β-rays from a 90Sr source. We have obtained a slightly degraded time resolution than the beam-test results, but the system is found to be useful for our development. In the development of 4-D detectors, the readout needs to be finely segmented (to sub-100μm) while maintaining a uniform gain over the wider area, and a high fill factor. One such device with the required segmentation is the AC-LGAD, in which the gain layer is implanted over the entire sensor area, and the signal is read out via segmented AC pads interleaved with an insulating layer. Several AC-LGAD structures were created in a TCAD simulation, and the optimal sensor design parameters were extracted.}
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\keyw{4D detector,Segmented LGAD,AC-LGAD,timing system}
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